Beam Technologies for Integrated Processing

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Size: 106 pages, 8.5 x 11

Publication Year:1992

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PAPERBACK ISBN-10: 0-309-04635-1 ISBN-13: 978-0-309-04635-0	$19.00	Add to Cart

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Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Commission on Engineering and Technical Systems, National Research Council
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Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials ...
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Table of Contents
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FRONT MATTER	i-xii	(skim)
1 INTRODUCTION	1-2	(skim)
2 SUMMARY AND RECOMMENDATIONS	3-8	(skim)
3 BEAM TECHNOLOGIES	9-32	(skim)
4 BEAM APPLICATIONS IN MICROELECTRONICS	33-42	(skim)
5 BEAM APPLICATIONS IN ENGINEERED MATERIALS	43-70	(skim)
6 INTEGRATED PROCESSING	71-80	(skim)
7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION	81-84	(skim)
APPENDIX A: ACRONYMS AND ABBREVIATIONS	85-86	(skim)
APPENDIX B: BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS	87-89	(skim)

Description

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components.

This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

Beam Technologies for Integrated Processing

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