Microelectromechanical Systems:

Microelectromechanical Systems:

Advanced Materials and Fabrication Methods (1997)

Print-On-Demand
76 pages | 8.5 x 11
978-0-309-05980-0

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Print-On-Demand
76 pages | 8.5 x 11
978-0-309-05980-0

Microelectromechanical Systems:

Advanced Materials and Fabrication Methods (1997)

  • Overview
  • Table of Contents
  • Related Resources

Authors

Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, Commission on Engineering and Technical Systems, National Research Council

Suggested Citation

National Research Council. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press, 1997.

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