%0 Book %A National Research Council %T Plasma Processing and Processing Science %D 1995 %U https://nap.nationalacademies.org/catalog/9854/plasma-processing-and-processing-science %> https://nap.nationalacademies.org/catalog/9854/plasma-processing-and-processing-science %I The National Academies Press %C Washington, DC %G English %P 45 %R doi:10.17226/9854