. "2. Expectations for Future Micro- and Nanotechnologies." Implications of Emerging Micro and Nanotechnology. Washington, DC: The National Academies Press, 2002.
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Implications of Emerging Micro- and Nanotechnologies
FIGURE 2-2 Lithography half-pitch feature size versus time. SOURCE: Adapted from the International Technology Roadmap for Semiconductors, 2001 edition. Austin, Tex.: International SEMATECH.