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PAPERBACK price:$34.75 add to cart Rights & Permissions Free PDF Access Sign in to download PDF book and chapters Free Resources PDF SUMMARY Display this book on your site! Related Titles Plasma Science:From Fundamental Research to Technological Applications Atomic, Molecular, and Optical Physics Other Related Titles Database Needs for Modeling and Simulation of Plasma Processing (1996) Commission on Physical Sciences, Mathematics, and Applications (CPSMA) Citation Manager Export the bibliographic data for this book in your chosen format Web Search Builder Use this book's key terms to search within this book, across our collection, or across the Web. Skim This Chapter Skim this chapter and use this chapter's key terms to search within this book. Reference Finder Paste in your own text to find books that relate to your topic. Citation Manager . "Appendix C: Workshop Participants." Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press, 1996. Please select a format: Page 63   E-mail Share on facebook Facebook Share on delicious Delicious Share on stumbleupon Stumble Share on twitter Twitter More Sharing ServicesMore The following HTML text is provided to enhance online readability. Many aspects of typography translate only awkwardly to HTML. Please use the page image as the authoritative form to ensure accuracy. Appendix C: Workshop Participants Wahab Ali AWA Associates Harold M.Anderson University of New Mexico Kaihan A. Ashtiani Materials Research Corporation Eray S. Aydil University of California at Santa Barbara James Babb Harvard-Smithsonian Center for Astrophysics Andrew D. Bailey III Plasma and Materials Technologies James N. Bardsley Lawrence Livemore National Laboratory Richard J. Buss Sandia National Laboratories Timothy S. Cale Arizona State University David C. Cartwright Los Alamos National Laboratory Charles Cerjan Lawrence Livemore National Laboratory Malcolm W. Chase National Institute of Standards and Technology Loucas G. Christophorou National Institute of Standards and Technology Joel M. Cook Lam Research Corporation Frederick Dill IBM T.J. Watson Research Center Vince Donnelly AT&T Bell Laboratories Demetre J. Economou University of Houston Erik Egan Motorola Douglas Ernie University of Minnesota Sychi Fang Intel Corporation David Fraser Intel Corporation Jean W. Gallagher National Institute of Standards and Technology Alan Garscadden Wright Laboratory Abe Ghanbari Materials Research Corporation Konstantinos P. Giapis California Institute of Technology Larry Goldberg National Science Foundation Steven M. Gorbatkin Oak Ridge National Laboratory R.A. Gottscho AT&T Bell Laboratories David B. Graves University of California, Berkeley David S. Green National Institute of Standards and Technology Michael Hartig Motorola/Sematech Gerald Hays Sandia National Laboratories Irving P. Herman Columbia University Dennis Hewett Lawrence Livemore National Laboratory Pauline Ho Sandia National Laboratories Bert Hui Defense Advanced Research Projects Agency Ellis Hyman Science Applications International Corporation Mitio Inokuti Argonne National Laboratory Les Jerde Tegal Corporation Rainer Johnsen University of Pittsburgh Glenn Joyce Naval Research Laboratory Yong-Ki Kim National Institute of Standards and Technology Kate Kirby Harvard-Smithsonian Center for Astrophysics Anantha Krishnan CFD Research Corporation Mark J. Kushner University of Illinois at Urbana-Champaign Page 63 Front Matter (R1-R10) Executive Summary (1-4) 1 Industrial Perspectives (5-12) 2 Tool Scale and Feature Scale Models (13-22) 3 Radiative Processes and Diagnostics (23-32) 4 Heterogeneous Processes (33-40) 5 Electron Collision Processes (41-46) 6 Ion Processes, Neutral Chemistry, and Thermochemical Data (47-58) Appendix A: Acronyms and Abbreviations (59-60) Appendix B: Workshop Agenda (61-62) Appendix C: Workshop Participants (63-64)

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--> Appendix C: Workshop Participants Wahab Ali AWA Associates Harold M.Anderson University of New Mexico Kaihan A. Ashtiani Materials Research Corporation Eray S. Aydil University of California at Santa Barbara James Babb Harvard-Smithsonian Center for Astrophysics Andrew D. Bailey III Plasma and Materials Technologies James N. Bardsley Lawrence Livemore National Laboratory Richard J. Buss Sandia National Laboratories Timothy S. Cale Arizona State University David C. Cartwright Los Alamos National Laboratory Charles Cerjan Lawrence Livemore National Laboratory Malcolm W. Chase National Institute of Standards and Technology Loucas G. Christophorou National Institute of Standards and Technology Joel M. Cook Lam Research Corporation Frederick Dill IBM T.J. Watson Research Center Vince Donnelly AT&T Bell Laboratories Demetre J. Economou University of Houston Erik Egan Motorola Douglas Ernie University of Minnesota Sychi Fang Intel Corporation David Fraser Intel Corporation Jean W. Gallagher National Institute of Standards and Technology Alan Garscadden Wright Laboratory Abe Ghanbari Materials Research Corporation Konstantinos P. Giapis California Institute of Technology Larry Goldberg National Science Foundation Steven M. Gorbatkin Oak Ridge National Laboratory R.A. Gottscho AT&T Bell Laboratories David B. Graves University of California, Berkeley David S. Green National Institute of Standards and Technology Michael Hartig Motorola/Sematech Gerald Hays Sandia National Laboratories Irving P. Herman Columbia University Dennis Hewett Lawrence Livemore National Laboratory Pauline Ho Sandia National Laboratories Bert Hui Defense Advanced Research Projects Agency Ellis Hyman Science Applications International Corporation Mitio Inokuti Argonne National Laboratory Les Jerde Tegal Corporation Rainer Johnsen University of Pittsburgh Glenn Joyce Naval Research Laboratory Yong-Ki Kim National Institute of Standards and Technology Kate Kirby Harvard-Smithsonian Center for Astrophysics Anantha Krishnan CFD Research Corporation Mark J. Kushner University of Illinois at Urbana-Champaign

OCR for page 64
--> Andrew Labun Digital Equipment Corporation Martin Lampe Naval Research Laboratory Barton Lane Plasma Dynamics James E. Lawler University of Wisconsin Chun C. Lin University of Wisconsin Gary Mallard National Institute of Standards and Technology Vasilios Manousiouthakis University of California, Los Angeles Jim Mc Vittie Stanford University Ellen Meeks Sandia National Laboratories Fred W. Meyer Oak Ridge National Laboratory M. Meyyappan Scientific Research Associates Michael Mocella Dupont Fluoroproducts W. Lowell Morgan Kinema Research and Software Gottlieb S. Oehrlein State University of New York at Albany Arthur V. Phelps JILA, University of Colorado Joseph Proud GTE (retired) Thomas Rescigno Lawrence Livemore National Laboratory Charles Roberson Office of Naval Research Yosuke Sakai Hokkaido University Martin Schmidt Institut fur Niedertemperatur-Plasmaphysik Greifswald Barry I. Schneider National Science Foundation Vikram Singh Lam Research Corporation Vivek Singh Intel Corporation Steve Slinker Naval Research Laboratory Santosh K. Srivastava Jet Propulsion Laboratory William Stwalley University of Connecticut M. Surendra IBM T.J. Watson Research Center Wing Tsang National Institute of Standards and Technology Anna Tsao Defense Advanced Research Projects Agency Vahid Vahedi Lawrence Livemore National Laboratory Richard J. Van Brunt National Institute of Standards and Technology Alexander M. Voshchenkov Lam Research Corporation James R. Whetstone National Institute of Standards and Technology Claude Woods University of Wisconsin Jody Wormhoudt Aerodyne Research Michael Zachariah National Institute of Standards and Technology

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