foundry approach of MCNC, which interacts with users only through exchanges of software, but it may provide an interim avenue until specific areas in the MEMS field are further developed.

Conclusion. Establishing standard CAD and foundry infrastructure for MEMS is essential in the near future to support the growth of MEMS from the prototype and low-volume commercial level to the volume-driven, low-cost commercial level. The development of a MEMS foundry-technology base, similar to the base that supports ICs, would assure users that MEMS products can be manufactured at competitive rates and would enable small companies and research organizations to enter the field.

Recommendation. A MEMS CAD-infrastructure that extends from processing and basic modeling to full system design capabilities should be established. A process technology infrastructure (e.g., electrical, mechanical, fluid, chemical, etc. and their integration to form complete systems) that is widely available to MEMS designers and product engineers should be developed.

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