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Auciello, O., A.R. Krauss, and K.D. Gifford. 1996. Sputter deposition of ferroelectric films and hetero structures: Analysis of orientation-microstructure-property relationships and in situ, real-time characterization of growth processes. Pp. 393-426 in Ferroelectric Thin-Films: Synthesis and Basic Properties, C. Paz de Araujo, J.F. Scott, and G.W. Taylor (eds). Reading, U.K.: Gordon and Breach Publishers.


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Becker, E.W., W. Ehrfeld, P. Hagmann, A. Maner, and D. Munchmeyer. 1986. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectronic Engineering 4(1): 35-56.

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Broenink, J., J. Bekkink, and P.C. Breedveld. 1992. Multibond-graph version of the CAMAS modeling and simulation environment. Pp. 253-262 in Bond Graphs for Engineers, P.C. Breedveld and G. Dauphin-Tanguy (eds). Amsterdam: North-Holland.

Busch, J.D., A.D. Johnson, and C.H. Lee. 1990. Shape-memory properties in Ni-Ti sputter-deposited film. Journal of Applied Physics 68: 6224-6228.


Claeyssen, F., N. Lhermet, R. LeLetty, and L. Chouteau. 1996. A new resonant magnetorestrictive rotating motor. Pp. 272-274 in Actuators 96, H. Borgmann (ed). Bremen, Germany: AXON Technologie Consult GmbH.

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Crary, S., O. Juma, and Y. Zhang. 1991. Software tools for designers of sensor and actuator CAE systems. Pp. 498-501 in Digest of Technical Papers from the Institute of Electrical and Electronics Engineers International Conference on Solid-State Sensors and Actuators (Transducers '91) held June 23-27, 1991, in San Francisco, California. New York: Institute of Electrical and Electronics Engineers.


Daneman, M.J., N.C. Tien, O. Solgaard, A.P. Pisano, K.Y. Lau, and R.S. Muller. 1995. Linear microvibromotor for positioning optical components. Pp. 55-60 in Proceedings of Institute of Electrical and Electronics Engineers International



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--> References Ahn, C.H., M.G. Allen, W. Trimmer, Y.N. Jun, S. Erramilli. 1996. A fully integrated micromachined magnetic particle separator. IEEE Journal of Microelectromechanical Systems 5(3): 151-158. Antonsson, E.K. (ed). 1996. Structural Design Methods for MEMS: Final Report of National Science Foundation Workshop. Washington, D.C.: National Science Foundation. Ataka, M., A. Omodaka, and H. Fujita. 1993. A biomimetric micro motion system: A ciliary motion system. Pp. 38-41 in Digest of Technical Papers from the International Conference on Solid-State Sensors and Actuators (Transducers '93) held June 7-10, 1993, in Yokohama, Japan. Yokohama, Japan: Institute of Electrical Engineers. Auciello, O., A.R. Krauss, and K.D. Gifford. 1996. Sputter deposition of ferroelectric films and hetero structures: Analysis of orientation-microstructure-property relationships and in situ, real-time characterization of growth processes. Pp. 393-426 in Ferroelectric Thin-Films: Synthesis and Basic Properties, C. Paz de Araujo, J.F. Scott, and G.W. Taylor (eds). Reading, U.K.: Gordon and Breach Publishers. Barth, P. 1995. Presentation to the Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems at the National Research Council, Washington, D.C., on December 11, 1995. Barth, P.W., S.L. Bernard, and J.B. Angell. 1985. Flexible circuit and sensor arrays fabricated by monolithic silicon technology. IEEE Transactions on Electron Devices 32(7): 1202-1205. Baughmann, R.H., L.W. Schacklette, R.L. Elsenbaumer, E.J. Plichta, and C. Becht. 1991. Microelectromechanical actuators based on conducting polymers. Pp. 267-289 in Molecular Electronics: Materials and Methods, P.I. Lazarev (ed). Dordrecht, Netherlands: Kluwer Academic Publishers. Beadle, W.E., J.C.C. Tsai, and R.D. Plummer (eds). 1985. Quick Reference Manual for Silicon Integrated Circuit Technology. New York: John Wiley and Sons. Beatty, C.C. 1996. A chronology of thermal ink-jet structures. Pp. 200-204 in Technical Digest from the Solid-State Sensor and Actuator Workshop held June 2-6, 1996, on Hilton Head Island, South Carolina. Cleveland, Ohio: Transducer Research Foundation. Becker, E.W., W. Ehrfeld, P. Hagmann, A. Maner, and D. Munchmeyer. 1986. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectronic Engineering 4(1): 35-56. Beebe, D.J., and D.D. Denton. 1994. Flexible polyimidebased package for silicon sensors. Sensors and Actuators A 44(1): 57-64. Beerschwinger, U., N.G. Milne, S.J. Yang, R.L. Reuben, A.J. Sangster, and H. Ziad. 1994. Coupled electrostatic and mechanical FEA of a micromotor. Institute of Electrical and Electronics Journal of Microelectromechanical Systems 3(4): 162-171. Broenink, J., J. Bekkink, and P.C. Breedveld. 1992. Multibond-graph version of the CAMAS modeling and simulation environment. Pp. 253-262 in Bond Graphs for Engineers, P.C. Breedveld and G. Dauphin-Tanguy (eds). Amsterdam: North-Holland. Busch, J.D., A.D. Johnson, and C.H. Lee. 1990. Shape-memory properties in Ni-Ti sputter-deposited film. Journal of Applied Physics 68: 6224-6228. Claeyssen, F., N. Lhermet, R. LeLetty, and L. Chouteau. 1996. A new resonant magnetorestrictive rotating motor. Pp. 272-274 in Actuators 96, H. Borgmann (ed). Bremen, Germany: AXON Technologie Consult GmbH. Cohn, M.B., Y. Liang, R.T. Howe, and A.P. Pisano. 1996. Wafer-to-wafer transfer of microstructures for vacuum packaging. Pp. 32-35 in Technical Digest from the Solid- State Sensor and Actuator Workshop held June 2-6, 1996, on Hilton Head Island, South Carolina . Cleveland, Ohio: Transducer Research Foundation. Crary, S., O. Juma, and Y. Zhang. 1991. Software tools for designers of sensor and actuator CAE systems. Pp. 498-501 in Digest of Technical Papers from the Institute of Electrical and Electronics Engineers International Conference on Solid-State Sensors and Actuators (Transducers '91) held June 23-27, 1991, in San Francisco, California. New York: Institute of Electrical and Electronics Engineers. Daneman, M.J., N.C. Tien, O. Solgaard, A.P. Pisano, K.Y. Lau, and R.S. Muller. 1995. Linear microvibromotor for positioning optical components. Pp. 55-60 in Proceedings of Institute of Electrical and Electronics Engineers International

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