MOS

metal oxide semiconductor

MOSIS

metal oxide semiconductor implementation system (now refers to a wider scope of technologies)

MST

microsystem technology


NITINOL

Ni/Ti thin-film material

NMOS

N-channel metal oxide semiconductor

NSF

National Science Foundation

NVFRAM

nonvolatile ferroelectric random access memory


PCA

portable clinical analyzer

PLAD

pulsed laser-ablation deposition

PECVD

plasma-enhanced chemical-vapor deposition

PMMA

polymethylmethacrylate

PSD

plasma sputter deposition


R&D

research and development.

RIE

reactive-ion etching


SAM

self-assembled monolayer

SMA

shape memory alloy


TI

Texas Instruments

TO

transistor outline


VLSI

very large-scale integration



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