National Academy of Sciences | 150 Year Anniversary

Questions? Call 800-624-6242

| Items in cart [0]

The National Academies Press

PAPERBACK
price:$34.75
add to cart

Rights & Permissions

topleft topright

Microelectromechanical Systems: Advanced Materials and Fabrication Methods (1997)
National Materials Advisory Board (NMAB)

Citation Manager

. "Front Matter." Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press, 1997.

Please select a format:

BibTeX EndNote RefMan


Page
XIV
bottomleft bottomright

The following HTML text is provided to enhance online readability. Many aspects of typography translate only awkwardly to HTML. Please use the page image as the authoritative form to ensure accuracy.


MOS

metal oxide semiconductor

MOSIS

metal oxide semiconductor implementation system (now refers to a wider scope of technologies)

MST

microsystem technology


NITINOL

Ni/Ti thin-film material

NMOS

N-channel metal oxide semiconductor

NSF

National Science Foundation

NVFRAM

nonvolatile ferroelectric random access memory


PCA

portable clinical analyzer

PLAD

pulsed laser-ablation deposition

PECVD

plasma-enhanced chemical-vapor deposition

PMMA

polymethylmethacrylate

PSD

plasma sputter deposition


R&D

research and development.

RIE

reactive-ion etching


SAM

self-assembled monolayer

SMA

shape memory alloy


TI

Texas Instruments

TO

transistor outline


VLSI

very large-scale integration

Page
XIV