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Appendix A Semiconductor Device Technologies The integrated circuit (IC) is the underlying component technol- ogy on which all the devices discussed in this appendix are and wiD be built in the foreseeable future. For the most part, over the next five to ten years, ICs win be made from silicon (Si). However, for special applications requiring radiation hardness and temperature tolerance, gallium arsenide (GaAs) devices will offer some advan- tages over silicon. From a production standpoint, GaAs costs will make these devices a high-end, Tow-volume item until such time as production costs match those of silicon. The dominant circuit technologies for the 1990s are expected to be the complementary metal oxide semiconductor (CMOS), bipolar emitter coupled logic (ECL), bipolar CMOS (BICMOS), and GaAs, in that order. Key parameters include feature (gate) density, power consumption, voltage requirements, and switching current and speed. The three dominant circuit technologies vary widely with respect to these parameters. CMOS offers high gate density, low power, and high switching speeds; bipolar offers high speed, relatively low density, and high-power consumption; and GaAs offers very high speeds and Tow power. COMPLEMENTARY METAL OXIDE SEMICONDUCTOR CMOS will play a dominant role in dynamic memories and other Tow-cost, lower performance applications. It will continue to be the 245

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246 APPENrDIX A basic technology of choice for many general-purpose computer sys- tems. CMOS offers both high speeds and low-power consumption at high densities. One-micron feature sizes are current state of the art and subm~cron CMOS is likely in the near term.1 CMOS power dissipation is low enough that some high-perfor- mance computer systems can be expected to be made of CMOS (because they can be air-cooled) in the intermediate term. This assumption, however, win not necessarily be valid forever, because at higher frequencies CMOS power dissipation may be too high at room temperature. In addition, cooling below room temperature will improve the speed of CMOS devices. For example, Control Data Cor- poration's ETA Systems uses a chilled CMOS in its supercomputer to enhance system performance. The geometries of very large scale integrated (VSI) circuits wiD continue to shrink, bringing CMOS down to submicron feature sizes. This shrinkage will result in denser logic and greater capacities for random access memories (RAM), as wed as decreases in gate delays and propagation paths leading to improvements in speed. As the geometries get smaller, ECL's performance advantage over CMOS lessens for Tow-capacitance circuits. For submicron gate lengths, CMOS will compete with ECI. in performance for low- capacitance applications.2 SILICON BIPOLAR EMITTER COUPLED LOGIC Bipolar emitter coupled logic continues to provide high speeds for custom logic, gate arrays, and static RAM. The current generations of higher performance computers (IBM 3090, Crays, Sperry 1100/90, and NEC's SX-2), minisupercomputers (Convex C-2), and m~nicom- puters (VAX 8600/~800) use ECL-based technology. In contrast to CMOS, bipolar devices offer higher speeds with higher power con- sumption. High-performance computer systems that utilize bipolar devices require advanced cooling systems (chilled water, immersion cooling, or Freon cooling) to dissipate heat generated by these de- vices. For memory, bipolar ECL offers a speed advantage ranging 1CMOS technology offers advantages over ECL for very large scale integrated (VLSI) circuits with high gate counts and low power. However, it has some disad- vantages in signal fidelity, impedance mismatch, noise sensitivity, and settling times. This assumes subnanosecond gate delays for minimum feature size gates with den- sities greater than 50 K gates per die. Intel's 80386 is a CMOS device with about 300 K devices per die.

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APPENDIX A 247 between a factor of 3 and a factor of 5 over CMOS. For gate arrays, bipolar devices offer speed advantages ranging between a factor of 2 and a factor of 10 over CMOS, depending on the application. A significant trend in bipolar technology has been the devel- opment of methodologies that trade off power and speed so that designers can use a much larger number of gates in a bipolar {C (as- suming that most transistors are low power). This innovation greatly enhances the feasibility of bipolar VESI. Better computer-aided de- sign (CAD) tools that choose transistor drive capability intelligently will be required to make the most of this technology. BIPOLAR COMPLEMENTARY METAL OXIDE SEMICONDUCTOR The bipolar complementary metal oxide semiconductor is an emerging technology that combines the advantages of CMOS and bipolar approaches. BICMOS technology is likely to be applied in static RAMs (SRAM), dynamic RAMs (DRAM), and microproces- sors. It is likely to become a dominant technology for SRAM and a major technology for application-specific integrated circuits (ASICs). BICMOS is heavily dependent on CAD tools and process stan- dardization, which does not exist. Suitable CAD tools and a standard process for BICMOS will be developed to support the commercial use of this technology by the mid-1990s. GALLIUM ARSENIDE Gallium arsenide's higher electron mobility gives it an inherent speed advantage over silicon. GaAs devices are being introduced into the market; small-scale digital circuits and GaAs ICs are produced in increasingly higher volumes. The speeds of GaAs prototype ICs surpass those of Si bipolar at Tower power dissipation, so their use in special computer systems is likely to emerge. In addition, GaAs- based short- and long-wavelength lasers and light-emitting diodes have been on the market for several years. Developments in these technologies, while initially applicable to telecommunications, may also emerge in third-level interconnect and networking of computers. Several GaAs devices are in advanced research or development. GaAs field effect transistors are the most mature of the GaAs tech- nologies that relate specifically to computing systems and are avail- able as commercial products. For example, SRAM ranging from 1 K

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248 APPENDIX A TABLE A.1 Performance of High-Speed Gate Arrays Number Technology of Gates and Company (k) Power Gate Delay (mW/gate) (pa) Comments ECL NEC 5 1.00 500 Loaded, 1.5,um NTT 2.5 2.60 78 R.O., 0.5,um Siemens 9 7.50 150 4 x 4 multiplier CMOS/SOS 8 0.45 870 Loaded G aAs Oki 1 0.27 390 1 sum Toshiba 2 0.50 215 Tektronix 1.2 0.25 200 SOURCE: Reprinted, with permission, from Greiling (1987~. Copyright 1987 by IEEE. to 16 K are in production and available from vendors in Japan and the United States. Application areas today are almost strictly in complex, digi- tal signal processing (using SRAMs, read-only memories (ROMs), high-density logic arrays, and FFT processors) for frequency coun- ters, correlators, multiplexers and demultiplexers, analog and digital converters, and time-interval counters that have on-chip clock fre- quencies above 1 GHz. Future near-term applications are likely to be in advanced digital signal processors and telecommunications systems. Systems requir- ing clock frequencies in the 250-MHz to 3-GHz range and integration levels of 100 gates per chip will use GaAs ICs. Mid-term (five years and beyond) applications are likely to be in high-performance computing systems. Cray, for example, plans to use GaAs technology (developed in conjunction with Philips) in the Cray-3 supercomputer, scheduled for delivery in 1991. Fujitsu is reported to have chosen GaAs/GaAlAs high electron mobility transistor (HEMT) technology for its next supercomputer. Tables A.1 and A.2 compare performance of commercially avail- able silicon CMOS, bipolar, and GaAs devices in gate arrays and memories.

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APPENDIX A TABLE A.2 Performance of High-Speed Memories Technology Size Access Power and Company (kbits) Time (ne) (mW/1K) Comments ECL Fujitsu 4 NEC NTT 3.20 2.30 0.85 1.10 Hitachi 4 2.50 Fairchild 64 15.00 NMOS/CMOS Bell NMOS Toshiba G aAs Fujitsu 1 1.S0 4 S.00 NTT 4 2.80 16 4.10 6.00 2.40 3.40 4 4 4 64 5.00 17.00 NEC 1 Fujitsu 1 (HEMT) 750 400 950 980 250 14 100 4.7 BOO 1.5,llm 175 BOO 160 S8 220 290 0.5pm 1.5 Am 2.0 him 1.0 ~m, x-ray 1.5 him (CMOS) 1.0,llm 1.0 Am 1.5~1m (300K) 0.90 (77K) 360 SOURCE: Reprinted, with permission, from Greiling (19873. Copyright 1987 by IEEE. 249