An Assessment of the National Institute of Standards and Technology Measurement and Standards Laboratories Fiscal Years 2004-2005 (2005) / Chapter Skim
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6 Manufacturing Engineering Laboratory
6 Manufacturing Engineering Laboratory
Pages 59-68
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From page 59... ...
The laboratory is organized in five divisions, as shown in Appendix A: · Precision Engineering Division (PED) , · Manufacturing Metrology Division (MMD)
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From page 60... ...
There is strong evidence that this project will successfully establish worldwide the reference standard for small-force measurement. The Precision Engineering Division has received high marks from the semiconductor industry for its leadership in both critical dimension and overlay metrology.
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From page 61... ...
TECHNICAL QUALITY AND MERIT The overall quality of research in the Manufacturing Engineering Laboratory is high. In general, all divisions are doing excellent technical work.
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From page 62... ...
The MMD retains outstanding capabilities and has state-of-the-art facilities for a number of metrology services. The XCALIBIR and Microforce Measurement projects are excellent examples that include newly developed, state-of-the-art capabilities derived from ongoing technical projects.
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From page 63... ...
An example of its responsiveness is the recent emphasis on developing the scatterfield metrology work, which aligns well with the resurgent interest in nanoscale optical metrology and its contribution to the fundamental understanding of optical metrological capability essential to nanomanufacturing. The PED is tracking the unique and specialized needs of the precision engineering industry that only a division with its own capabilities could satisfy, focusing on those needs and allowing more basic and commodity-type needs to be accomplished by ancillary and/or commercial laboratories and services.
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From page 64... ...
The division fulfills this role through its own internal projects and by acting as a catalyst or facilitator for collaborative efforts between government, industry, and academia. The Advanced Optics Metrology Program's XCALIBIR component of the MEL Dimensional Metrology Program is focused on an area of significant metrology need in semiconductor manufacturing.
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From page 65... ...
The MSID has also exhibited agility in the refocusing and redirection of expertise into NIST core program focus areas such as homeland security and health care. The MSID management team is to be commended for evaluating opportunities and focusing effort on the areas of most likely success and impact while meeting mission objectives.
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From page 66... ...
In particular, MSID has championed and implemented STEP geometric dimensioning and tolerancing for AP203 E2. The division has also supported the acceleration of the efforts to integrate STEP with mainstream modeling technologies including XML Schema and Unified Modeling Language.
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From page 67... ...
The MSID has also become proactive and successful in promoting staff through mechanisms such as awards. The Manufacturing Engineering Laboratory's technical planning is very good, with the caveat that
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From page 68... ...
Laboratory management has taken steps to ensure that MEL staff is assessed by supervisors who are familiar with their project requirements and accomplishments. An example of the successful result of the new matrix management structure is the consolidation of previous large-scale engineering and surface metrology programs into a single Dimensional Metrology Program, and then using this organizational change to take advantage of economics of the scale of resources, the combination of laboratories, other space, and budgets.
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