Plasma Processing of Materials Scientific Opportunities and Technological Challenges (1991) / Chapter Skim
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2 PLASMA PROCESSING AND LOW-ENERGY PLASMA SCIENCE
2 PLASMA PROCESSING AND LOW-ENERGY PLASMA SCIENCE
Pages 6-12
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From page 6... ...
Plasma processing of materials is also a cntical technology in, for example, the aerospace, automotive, steel, biomedical, and toxic waste management industries (Figure 2.1~. Most recently, plasma processing technology has been utilized increasingly in the emerging technologies of diamond film and superconducting film growth.
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From page 7... ...
CLASSIFICATION OF PLASMAS A plasma is a partially or fully ionized gas containing electrons, ions, and neutral atoms and/or molecules. Plasma science is the study of the nonlinear collective interactions of electrically charged particles with each other, with neutral atoms and molecules, and with electric and magnetic fields.
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From page 8... ...
BRIEF HISTORY OF LOW-ENERGY PLASMA SCIENCE AND TECHNOLOGY Although ionospheric and, indeed, many astrophysical plasmas are classified as low-energy plasmas, the bulk of plasma science that is currently practiced in this domain is gaseous electronics-based. In its original form, the gas discharge branch of Langrnuir's plasma physics, founded in the early part of this century, focused on electron conduction and breakdown in gases, electron emission and other cathode phenomena, and excitation of atomic and molecular species by electron collisions.
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From page 9... ...
Some of these processes and corresponding applications include: Plasma-controlled anisotropic etching in fabrication of microelectronic chips; Plasma deposition of silicon nitride for surface passivation and insulation; Surface oxidation used in fabrication of silicon-based microelectronic circuits; Plasma-enhanced chemical vapor deposition of amorphous silicon films used in solar cells; Plasma-surface treatment for improved film adhesion to polymer surfaces; Plasma nitriding, which is used to harden the surface of steel; Plasma-enhanced chemical vapor deposition and thermal plasma chemical vapor deposition of diamond thin films; Plasma spray deposition of ceramic or metal alloy coatings used for protection against wear or corrosion in aircraft and automotive engines;
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From page 10... ...
For processes of interest to the electronics industry, the rapid deposition of thick films using plasma spraying or thermal plasma chemical vapor deposition (TPCVD) are the processes of principal interest.
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From page 11... ...
Data bases needed to develop understanding of most plasma processing systems extend beyond data on homogeneous plasma phenomena to data on the coupling of the plasma with surfaces. Surface processes cause steep spatial gradients in plasma parameters, which greatly complicate data acquisition and system modeling, and alter the chemistry in the plasma.
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From page 12... ...
The recommendations made in this report necessarily emphasize the processing of materials for the electronics industry, and, in this sense, its coverage of new materials processing for the aerospace, automotive, and other industries is incomplete. The pane} urges further assessment of these areas with respect to the role and criticality of plasma technology.
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