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Plasma Processing of Materials Scientific Opportunities and Technological Challenges (1991) / Chapter Skim
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1 SUMMARY, FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS
Pages 1-5

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From page 1...
... Thus Chapter 3 further elucidates plasma processing of electronic materials and, in particular, the use of plasmas in fabricating microelectronic components. The plasma equipment industry is an integral part of the electronics industry and has experienced dramatic growth in recent years because of the increasing use of plasma processes to meet the demands of fabricating devices with continually shrinking dimensions.
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From page 2...
... The central scientific problem underlying plasma processing concerns the interaction of low-energy collisional plasmas with solid surfaces. Understanding this problem requires knowledge and expertise drawn from plasma physics, atomic physics, condensed matter physics, chemistry, chemical engineering, electrical engineering, materials science, computer science, and computer engineering.
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From page 3...
... A reliable and extensive input data base for calculating plasma generation, transport, and surface interaction. The dearth of basic data neecled for simulation of plasma generation, transport, and surface reaction processes results directly from insufficient generation of data, insufficient data compilation, insufficient distribution of data, and insufficient funding of these activities.
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From page 4...
... As a result, the United States will not be prepared to maintain its leading market position in plasma processing, let alone capture more market share as the plasma process industry grows into the 21st century. Finding: Graduate programs are not offering adequate educational opportunities in the science of weakly ionized, highly collisional plasmas.
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From page 5...
... Accordingly, the panel recommends: · As part of the Plasma Processing Program, government and industry together should support cooperative programs specific to plasma processing with universities and national laboratories. A program should be established to provide industrial internships for teachers and professors in the area of plasma processing.
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Key Terms

  • processing program
  • plasma generation
  • collisional plasmas
  • plasma processes
  • surface processes

  • plasma reactors
  • basic data
  • plasma reactor
  • highly collisional
  • fabricating microelectronic

  • critical technology
  • aerospace industry
  • plasma equipment
  • insufficient funding
  • plasma process

  • diagnostic techniques
  • processing technology
  • materials processing
  • material properties
  • properties related

  • weakly ionized
  • techniques exist
  • vlsi microelectronic
  • atomic physics
  • providing key

  • studies using
  • strong leadership
  • interactions affect
  • promote coordination
  • waste management


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