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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 37-37

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From page 37...
... There may be many reaction pathways that result in the loss of the incident species. The most important parameter affecting 5 is probably the coverage, and, in particular, this involves the determination ofthe coverage that would be encountered in a plasma processing system.
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Key Terms

  • rate coefficients
  • plasma processing
  • plasma process
  • incident species
  • charge exchange

  • surface reactions
  • ion bombardment
  • reaction rate
  • silicon dioxide
  • temperature dependence

  • reaction layer
  • surface reaction
  • molecular species
  • plasma reactor
  • sticking coefficients

  • species incident
  • reaction pathways
  • surface temperature
  • electronically excited


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