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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 41-41

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From page 41...
... , which are measured in some cases but do not provide adequate information on the specific ionic species produced. Chnnnel-specific ionization cross sections are available for a variety of plasma processing compounds, including SiH4, CF4, SF6, CC12F2, and 02, as well as the common Puree has N'.
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Key Terms

  • cross sections
  • plasma processing
  • ionization cross
  • plasma process
  • dissociative ionization

  • cross section
  • plasma etching
  • collision cross
  • section measurements
  • total ionization

  • near threshold
  • vibrationally excited
  • target species
  • fragment ions
  • complex molecules

  • excited molecules
  • electronically excited
  • section data


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