Skip to main content

Currently Skimming:


Pages 50-50

The Chapter Skim interface presents what we've algorithmically identified as the most significant single chunk of text within every page in the chapter.
Select key terms on the right to highlight them within pages of the chapter.


From page 50...
... Measurements ofthese cross sections for systems of interest to plasma processing are in general sparse; however, definitive embedments for a subset ofthe gases of interest have been performed by Armentrout et al.~° for energies of O to 80 eV. (See Figure 6.2.)


This material may be derived from roughly machine-read images, and so is provided only to facilitate research.
More information on Chapter Skim is available.